| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3598030cb79ce8e5f53140313b8f816 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02378
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32 |
| filingDate |
2011-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95a85c539f3fa46bf480c7ace1437d42 |
| publicationDate |
2012-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012156429-A |
| titleOfInvention |
Aluminum carbide thin film, semiconductor substrate on which aluminum carbide thin film is formed, and manufacturing method thereof |
| abstract |
Disclosed are a crystalline aluminum carbide thin film, a semiconductor substrate on which a crystalline aluminum carbide thin film is formed, and a method for manufacturing the same. According to the present invention, there is provided an aluminum carbide thin film characterized by containing aluminum carbide crystals. According to another aspect of the present invention, an aluminum carbide thin film is manufactured by supplying a gas containing carbon and a gas containing aluminum to grow an aluminum carbide crystal on a substrate to form an aluminum carbide thin film. A method is provided. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020077749-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7177437-B2 |
| priorityDate |
2011-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |