http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012153983-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f278bf3e3bd12896f71fc0e87dd1684 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M10-0562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M10-052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M10-0585 |
| filingDate | 2012-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_909e0ca8fe081b9d92f07513d14891b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e920f1b07358cd038246caed243945c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3eeb67d15a3406c9f5108c453f16cc81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ae6a461cd639992a2e15c6d50cde473 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_660f1a03612d703ea8e52e40a17ea37d |
| publicationDate | 2012-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012153983-A |
| titleOfInvention | Method for producing solid electrolyte thin film and method for producing thin film solid lithium ion secondary battery |
| abstract | A method for producing a solid electrolyte thin film using a magnetron sputtering apparatus capable of producing a thin film electrolyte free from surface damage due to energy in plasma and a method for producing a thin film solid lithium ion secondary battery are provided. In a method of manufacturing a solid electrolyte thin film using a parallel plate magnetron sputtering apparatus, a rare gas and a nitrogen gas are supplied by a sputtering method using a target made of a lithium phosphate sintered body. A solid electrolyte thin film which is a nitrogen-substituted lithium phosphate thin film is produced under a pressure of ˜2.0 Pa, and a thin film solid lithium ion secondary battery having the obtained solid electrolyte thin film is produced. [Selection] Figure 1 |
| priorityDate | 2012-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.