http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012151517-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-342 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-321 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-343 |
| filingDate | 2012-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d39669cab44adbf5ecd73f4ea29d99db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_317350ff397730672d05ac30d18f3e25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6e1ea70e4bce34d81a8d8dacf70abda http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70e5a53cf5aee750841c7b0a2254ffbd |
| publicationDate | 2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012151517-A |
| titleOfInvention | Manufacturing method of semiconductor optical device |
| abstract | An object of the present invention is to provide a method of manufacturing a semiconductor optical device in which deterioration of characteristics and reliability of the semiconductor optical device are suppressed. A method of manufacturing a semiconductor optical device according to the present invention includes an active layer forming step for forming an active layer, and an active layer protective film for forming a phosphorous III-V semiconductor layer after the active layer forming step. And a silicon-based film forming step of forming a silicon oxide-based or silicon nitride-based film after the active layer protective film forming step. [Selection] Figure 1 |
| priorityDate | 2007-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.