http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012151394-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2011-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddd8f405d8270376afe7d0d78416642b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_490775200cdc62009ec14325d5adfff3 |
| publicationDate | 2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012151394-A |
| titleOfInvention | INJECTION DEVICE, PATTERN FORMING DEVICE, INJECTION METHOD, AND PATTERN FORMATION METHOD |
| abstract | A pattern forming technique capable of forming a pattern on a substrate by injecting a material having a high viscosity is provided. A laminated body S is formed by laminating a pressure generating member 42 including camphor as a sublimable material on the surface of a transparent base material 41, and laminating a metal paste 43, which is a high viscosity material, thereon. . The stacked body S and the substrate W to be processed are arranged to face each other. Then, while the laser beam irradiation unit 60 moves relative to the substrate W, the laser beam irradiation is turned on and off to heat a part of the pressure generating member 42. In a part of the pressure generating member 42 heated by laser light irradiation, a pressure wave is generated due to a rapid volume expansion resulting from sublimation of camphor. Due to the pressure generated in this manner, the metal paste 43 immediately above is injected toward the substrate W, and a pattern of the metal paste 43 is formed on the surface of the substrate W. [Selection] Figure 6 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104674212-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104674212-A |
| priorityDate | 2011-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.