http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012148313-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_061520435b4409e03bc30947d141ed69 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00 |
filingDate | 2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3226816c19cffd01f2e25614698895c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_befa47816a3185c70317c725a4411564 |
publicationDate | 2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2012148313-A |
titleOfInvention | Laser processing equipment |
abstract | PROBLEM TO BE SOLVED: To provide a laser processing apparatus capable of performing high precision laser processing. A laser oscillator 41 that generates a laser beam L, an XY scanner 47 that scans an irradiation position of the laser beam L on a workpiece W in an XY direction, and an incident angle of the laser beam L that is incident from the XY scanner 47. The telecentric lens 48 that makes the emission angle of the laser light L emitted toward the workpiece W constant, and the integrally formed housing frame 60 that houses the laser oscillator 41 and the XY scanner 47 are included. The housing frame 60 has a partition plate 61 disposed so as to intersect the outgoing optical axis of the laser oscillator 41. [Selection] Figure 5 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10456864-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7338459-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7315709-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017056481-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022531926-A |
priorityDate | 2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.