http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012148313-A

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Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_061520435b4409e03bc30947d141ed69
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00
filingDate 2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3226816c19cffd01f2e25614698895c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_befa47816a3185c70317c725a4411564
publicationDate 2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2012148313-A
titleOfInvention Laser processing equipment
abstract PROBLEM TO BE SOLVED: To provide a laser processing apparatus capable of performing high precision laser processing. A laser oscillator 41 that generates a laser beam L, an XY scanner 47 that scans an irradiation position of the laser beam L on a workpiece W in an XY direction, and an incident angle of the laser beam L that is incident from the XY scanner 47. The telecentric lens 48 that makes the emission angle of the laser light L emitted toward the workpiece W constant, and the integrally formed housing frame 60 that houses the laser oscillator 41 and the XY scanner 47 are included. The housing frame 60 has a partition plate 61 disposed so as to intersect the outgoing optical axis of the laser oscillator 41. [Selection] Figure 5
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10456864-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7338459-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7315709-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017056481-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022531926-A
priorityDate 2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 20.