Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T50-60 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04 |
filingDate |
2010-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50b56c504f8623897b3c0d890fb060b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2745889b3c27d87fea7fe271ef26fe08 |
publicationDate |
2012-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2012140644-A |
titleOfInvention |
Masking material, masking layer, substrate masking method and substrate coating method |
abstract |
Masking is used in the coating process, but in the coating process using the gas phase, it is necessary to protect the portion where the coating should not be performed, particularly in an airtight manner, and to solve this problem. Two layers of a ceramic layer and a metal layer are used. [Selection] Figure 1 |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019504233-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10662787-B2 |
priorityDate |
2009-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |