http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012136506-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D211-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D207-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 |
| filingDate | 2011-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670712e4c98df4c464bc1ac57747e207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 |
| publicationDate | 2012-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012136506-A |
| titleOfInvention | Salt and resist composition |
| abstract | A resist composition capable of obtaining a pattern having excellent line width roughness (LWR) is provided. A salt represented by formula (I). [R 1 and R 2 represent a hydrogen atom or a hydrocarbon having 1 to 12 carbon atoms, R 3 represents a hydrocarbon having 2 to 12 carbon atoms, or R 2 and R 3 are bonded to each other to form a carbon atom together with a carbon atom. A ring of several 3 to 20 is formed. R 4 and R 5 represent a hydrogen atom, a fluorine atom or a C 1-6 perfluoroalkyl group. X 1 represents a divalent hydrocarbon group having 1 to 17 carbon atoms, and a hydrogen atom contained in the divalent hydrocarbon group may be substituted with a fluorine atom, and the divalent hydrocarbon group includes The —CH 2 — contained may be replaced by —O— or —CO—. W 1 represents a heterocyclic ring having 4 or 5 carbon atoms. A + represents an organic cation. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900795-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015148652-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013164574-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013177854-A1 |
| priorityDate | 2010-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 260.