http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012135946-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cebc9740ef706cde29e885504f274ffa |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C39-10 |
| filingDate | 2010-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e712577403d33d8f8039ac322cce7ac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50aee477de9f8ad875d70ffa829f7eb1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0384c912e77d9178f9c4fc742cb54cd7 |
| publicationDate | 2012-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012135946-A |
| titleOfInvention | Manufacturing method and manufacturing apparatus for article having fine uneven structure on surface |
| abstract | A micro uneven structure capable of easily and accurately monitoring the state of a mold surface while producing an article having the fine uneven structure on the surface by transferring the fine uneven structure on the surface of the mold to the surface of the article body. A method and apparatus for manufacturing an article having a surface on the surface thereof are provided. The fine concavo-convex structure is transferred to the surface of a film (article body), and the fine concavo-convex structure is transferred to the surface of the film in a region having the fine concavo-convex structure on the surface of the mold after separation from the film. The transfer area and the fine concavo-convex structure formed on the surface of the film 42 are irradiated with light, and the reflected light from the transfer area and the reflected light from the non-transfer area are measured by the measuring device 34 (measurement means). Then, the signal processing device 36 (determination means) determines the state of the surface of the mold 20 based on the measurement data of the reflected light from the transfer region and the measurement data of the reflected light from the non-transfer region, and transfers the concavo-convex structure to the article. Judge the quality of the. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016217784-A |
| priorityDate | 2010-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.