abstract |
A highly sensitive sensor chip is realized. A sensor chip has a concavo-convex structure composed of a substrate, and convex portions, which are arranged in a lattice pattern on the surface of the substrate, and a concave portion between the convex portions. And metal nanoparticles 30 arranged with a minute gap that causes surface plasmon resonance by the upper ridge lines 22a and 23a of the protrusions 22 and 23 adjacent to each other in the concavo-convex structure. By irradiating laser light between metal fine particles, localized surface plasmon resonance occurs more efficiently. As a result, a sensor chip capable of taking out surface-enhanced Raman scattering and detecting a substance with high sensitivity can be realized. [Selection] Figure 1 |