http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012124346-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C211-63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C53-126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C53-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C59-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C53-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C53-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2010-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6602369c5727b11b03570b310bf13f1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_311ddcbdfb459b3b688c1802943f25c9 |
| publicationDate | 2012-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012124346-A |
| titleOfInvention | Liquid repellent treatment composition for immersion exposure apparatus, liquid repellent treatment method for immersion exposure apparatus, liquid repellent treatment composition set for immersion exposure apparatus, and liquid repellent treatment method for immersion exposure apparatus using the same |
| abstract | The present invention provides a liquid repellent treatment composition for an immersion exposure apparatus and a liquid repellent treatment method for forming a liquid repellent treatment layer having good adhesion. The composition is a composition for liquid-repellent treatment of a member surface of an immersion exposure apparatus that irradiates an exposure beam and exposes a substrate through a liquid, and at least represented by the following general formula (1): It contains the organosilicon compound shown and a solvent. In the formula, R 1 is a monovalent organic group having 14 to 30 carbon atoms, R 2 , R 3 and R 4 are each independently a monovalent organic group having 1 to 10 carbon atoms or a hydrolyzable group; At least one of 2 , R 3 and R 4 is a hydrolyzable group. [Chemical 1] [Selection figure] None |
| priorityDate | 2010-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.