| abstract |
Provided are a piezoelectric actuator having a small characteristic deterioration with respect to repeated application of a driving voltage, a droplet discharge head using the piezoelectric actuator, and a droplet discharge device. In a piezoelectric actuator having at least a substrate, a vibration layer film, a piezoelectric film, and two electrode films, the Ti, Ta, Zr, V, and Nb are in contact with the piezoelectric film. Barrier layers 10 and 11 composed of at least one metal element selected from Mo, oxygen element and carbon element are provided. [Selection] Figure 2 |