http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012121127-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d62b1f36e1ae14c06f95ad276010ff5f http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_25afcb7bf2c0d839bb9118680e60e1ae |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2010-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_774e0d5cc96cd82a00b73f6062ef81b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a5ae01ebc55b8d67da6f82788e1b7e3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61196805611a22c1a1c6e07638217dd2 |
| publicationDate | 2012-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012121127-A |
| titleOfInvention | Composite abrasive and polishing composition using the same |
| abstract | The present invention provides a method for producing composite abrasive grains capable of performing highly accurate polishing with high efficiency and low cost. The composite abrasive grain of the present invention comprises first inorganic particles and organic particles enclosing the second inorganic particles, and the first inorganic particles are adhered to the surface of the organic particles. To do. Here, for example, the first inorganic particles are ceria particles, the second inorganic particles are silica particles, and the organic particles are urethane particles. By using this composite abrasive grain, it is possible to perform polishing at a high polishing rate while ensuring a surface roughness equivalent to that when using abrasive grains composed of only ceria particles. Moreover, according to the composite abrasive grain of the present invention, the amount of ceria particles containing rare earths can be suppressed, and the cost and supply stability of the abrasive grains can be reduced. [Selection] Figure 1B |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015528031-A |
| priorityDate | 2010-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.