abstract |
A method of manufacturing a piezoelectric film capable of manufacturing a piezoelectric film having a large amount of strain is provided. A piezoelectric material containing Bi, Fe, Mn, Ba, and Ti, wherein Bi / (Fe + Mn), which is the molar ratio of Bi to the total amount of Fe and Mn, is 1.02 to 1.08. A step of forming a piezoelectric precursor film from the film forming composition; and a step of heating and crystallizing the piezoelectric precursor film. [Selection figure] None |