http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012103336-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4283a2f8ade5dc582d75300427a38e50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate | 2010-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db1a9ffce0c9b3e979c4bb185bdf443a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0bd0e479c3f0617ac232c90b553d59f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0f0d03c5dd0a5c6aeba5845413a32d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d32d0b402cad75c1353a92a50fa6f04 |
| publicationDate | 2012-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012103336-A |
| titleOfInvention | Method for forming organic-inorganic composite film and developer for organic-inorganic composite film |
| abstract | A method of developing an organic-inorganic composite film by developing an organic-inorganic composite film having a high inorganic fine particle content and a developer capable of developing the organic-inorganic composite film having a high inorganic fine particle content are provided. At least one inorganic selected from the group consisting of silicon, metal, silicon or metal oxide, silicon or metal nitride, silicon or metal carbide, and a composite of at least two of them. When pattern-exposing and developing a photosensitive film containing 60 to 98% by weight of fine particles and 2 to 40% by weight of a photosensitive resin composition comprising an alkali-soluble resin and a photopolymerization initiator in terms of solid content Developed with a developer containing an acetylene alcohol surfactant having an HLB value of 7 to 18 by the Griffin method, an alkali component and water. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112272799-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112313582-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021523417-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7270647-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013015666-A |
| priorityDate | 2010-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 138.