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filingDate 2010-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28771fafadd3bb8e4b80bcc69db90468
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publicationDate 2012-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2012101998-A
titleOfInvention High purity silicon fine powder production equipment
abstract An object of the present invention is to provide a silicon manufacturing apparatus capable of obtaining a high-purity silicon with fineness and fineness with minimum energy and high efficiency. In the apparatus for producing high-purity silicon fine particles, (1) a mechanism for heating and evaporating metallic zinc above the boiling point of zinc and heating the generated gas to supply zinc gas at 1000 ° C. or higher (2 ) A mechanism for supplying liquid silicon tetrachloride into the zinc gas; (3) a mechanism for mixing and reacting the zinc gas and the silicon tetrachloride to produce a reaction gas containing silicon particles; and (4) A mechanism for agglomerating and growing silicon particles generated in the gas by lowering the temperature of the reaction gas to 1000 ° C. or less; and (5) an aqueous solution in which a gaseous substance containing the grown silicon particles in the reaction gas is brought into contact with a zinc chloride aqueous solution. An apparatus for producing high-purity silicon fine particles, comprising a precipitation collection mechanism for precipitating and collecting silicon therein. [Selection] Figure 1
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