| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c78c848f9500f6d17708acbe025a70b6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07357 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2010-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a59172f7de5cf8f897e4dc892089e1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_869ae470351df365907e995d8e8d85b5 |
| publicationDate |
2012-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012093127-A |
| titleOfInvention |
Vertical probe head |
| abstract |
PROBLEM TO BE SOLVED: To provide a vertical probe head having a low-cost structure in which a probe needle having a bent portion can be easily inserted and replaced in a probe housing and the accuracy of the probe tip position is easily maintained. A vertical probe head 1 of the present invention is in contact with a probe tip 2a that is electrically connected to a test terminal 5a and a connection terminal 4a of an interposer 4 that transmits a signal to an electric signal measuring device. A probe needle 2 having an electrically conductive probe rear end 2b and having a bent portion 2e that bends left and right along the longitudinal direction between the probe lower portion 2c and the probe upper portion 2d, and the probe needle on the probe tip side A probe housing 3 having an upper through-hole 3c having a first opening 3a that can be inserted from the bottom, a lower through-hole 3d having a second opening 3b that projects the probe tip toward the electronic device, and an upper silicon substrate 3e. And a lower silicon substrate 3f. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140114288-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7130247-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020197413-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7110817-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140140494-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9829509-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11519937-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018044912-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102193964-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I626449-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102148842-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020026972-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023105553-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102150431-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014181910-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102331204-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014232030-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200018221-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10309988-B2 |
| priorityDate |
2010-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |