http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012088448-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2010-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ffe53f638eec2a80b39615c3468bfb9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c64bf1e627002819df6a4a811220b667 |
| publicationDate | 2012-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012088448-A |
| titleOfInvention | Positive resist composition and resist pattern forming method |
| abstract | A positive resist composition capable of reducing the influence of other resist compositions after pattern formation, and a resist pattern forming method are provided. A positive resist composition comprising a base component (A) whose solubility in an alkaline developer is increased by the action of an acid, and an acid generator component (B) that generates an acid upon exposure, The base component (A) includes an amide group and a structural unit derived from an acrylate ester having a ring skeleton in the structure thereof (a0- 1) a structural unit derived from an acrylate ester containing a primary or secondary hydroxyl group or a primary or secondary amino group and having no ring skeleton in its structure (a0-2) And a resin component having a structural unit derived from an acrylate ester and having a structural unit (a1) containing an acid dissociable, dissolution inhibiting group. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012088449-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11537046-B2 |
| priorityDate | 2010-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 349.