| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D17-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2012-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0af7648b4f24ce746a46aae50d6bbf5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_503395fd851461a4a70a362639143401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23d7db299bd273b2061d12a2a86c7953
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80a6b197d045e35866e4aaef8fcdf567
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a86e8ffcf76180ff24d38544ac2dc515 |
| publicationDate |
2012-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012082527-A |
| titleOfInvention |
Supply device |
| abstract |
A supply apparatus is provided for supplying a solid precursor compound to a reactor in a gas phase. The apparatus includes an outlet chamber and an inlet chamber that includes a precursor composition that includes a solid precursor compound and a layer of filler material disposed on the solid precursor compound. It is a gas phase supply device. Such an apparatus includes a precursor composition of a solid precursor compound having a layer of filler material thereon. Also provided is a method for transferring a carrier gas saturated with a precursor compound for delivery into a CVD reactor. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220025794-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015038252-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9598766-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102445312-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10443128-B2 |
| priorityDate |
2004-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |