http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012082467-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate | 2010-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fdc61260a3bfc0f802fcf0d16d42e60 |
| publicationDate | 2012-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012082467-A |
| titleOfInvention | Plasma CVD film forming apparatus and film forming method |
| abstract | A plasma CVD film forming apparatus that suppresses film formation defects due to foreign substances is provided. A first film-forming roll 31 around which a base material 100 is wound, and a second film-forming roll 32 that faces the first film-forming roll 31 and around which the base material 100 is wound downstream of a transport path of a substrate 100. And magnetic field forming devices 61 and 62 that are respectively provided inside the first and second film forming rolls and form an endless tunnel-like magnetic field swelled in a space facing the first and second film forming rolls, Between the first film-forming roll 31 and the second film-forming roll 32, which is connected to the first film-forming roll 31 and the second film-forming roll 32 and in which the polarity of the applied voltage is alternately reversed, and between the first film-forming roll 31 and the second film-forming roll 32 , And turn bars 22 and 23 that change the transport direction of the base material 100 by winding the base material 100 on the film forming surface 100a, and the turn bars 22 and 23 are a plurality of jets for jetting gas. It has a mouth, and the film formation surface 1 from the injection port The gas is ejected to float the substrate 100 to 0a. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014061597-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10704148-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015053143-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015083681-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015053143-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014061597-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015098672-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105848880-A |
| priorityDate | 2010-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 63.