http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012078239-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7af673589ca45d2fd8b9ea902cdbd1dc |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate | 2010-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfd46c0e4bbe0b3c45a7c42ea18455ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eef8e487112a6ac6fe85aaffd3840986 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2e5cc48e19255b6fbdc2ba5ac93f353 |
| publicationDate | 2012-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012078239-A |
| titleOfInvention | Pressure sensor and manufacturing method thereof |
| abstract | A pressure sensor capable of suppressing variations in the thickness of a diaphragm and a method for manufacturing the same are provided. A first substrate having a surface on which a first recess is formed by anisotropic etching, and a surface joined to the surface of the first substrate so that the first recess becomes a sealed space. The second substrate 20 has a side surface that can be deformed according to the pressure of the measurement medium. The first substrate 10 is provided with a gauge resistor 40 whose resistance value changes according to side surface deformation. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8829627-B2 |
| priorityDate | 2010-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.