http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012074736-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8534776dcd693ec521554d5e9c14e31b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe27506479ee451358c4b587d00a89e5 |
| publicationDate | 2012-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012074736-A |
| titleOfInvention | CMP composition for improved oxide removal rate |
| abstract | The present invention provides a chemical-mechanical polishing composition comprising an abrasive, a halide salt, and water. The present invention further provides a method of chemically-mechanically polishing a substrate with a chemical-mechanical polishing composition and a polishing pad. A chemical-mechanical polishing composition comprising: (A) 0.01% to 1% by weight of an abrasive selected from the group consisting of alumina, ceria, zirconia, and combinations thereof (b) an anion selected from the group consisting of Cl − , Br − , and I − Comprising 0.05 mM to 30 mM halide salt, and (c) water, Here, a polishing composition having a pH of less than 9. [Selection figure] None |
| priorityDate | 2004-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.