| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2011-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2a9aacf507db12b95a8f92ddad3e63f |
| publicationDate |
2012-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012053460-A |
| titleOfInvention |
Resist composition and method for producing resist pattern |
| abstract |
Provided is a resist composition capable of producing a pattern with a wide focus margin and a small number of defects. (A) a resin having a structural unit derived from a compound represented by formula (a), (B) A salt represented by the formula (B1) (D) A resist composition containing a solvent. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102447897-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758466-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016052860-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016104721-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102438046-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160056308-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10725380-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016052859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10774029-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160024808-A |
| priorityDate |
2010-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |