| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bdefb2fd5ee90279c4b06bcc558aa58e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3488
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02 |
| filingDate |
2010-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70f37947dde5ae6a53bfff0be55bb7fa |
| publicationDate |
2012-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012038668-A |
| titleOfInvention |
Ion source electrode cleaning method |
| abstract |
PROBLEM TO BE SOLVED: To provide a cleaning method capable of removing deposits at a high speed over a wide area of an electrode constituting an extraction electrode system of an ion source. Instead of introducing an ionized gas into a plasma generation unit 4 of an ion source 2 and extracting an ion beam, a cleaning gas 48 is provided between a first electrode 11 and a second electrode 12 constituting an extraction electrode system 10. And a gas pressure between the first electrode 11 and the second electrode 12 is maintained between the first electrode 11 and the second electrode 12 in a state where the gas pressure between the first electrode 11 and the second electrode 12 is kept higher than the gas pressure at the time of ion beam extraction. A voltage is applied from the discharge power source 60 to generate a glow discharge 80 of the cleaning gas 48 between the electrodes 11 and 12. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016524277-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014074414-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013098143-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101941867-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014025611-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101876812-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015524606-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9530615-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180032601-A |
| priorityDate |
2010-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |