http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012033619-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 2010-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6826fe6092e0d30f2a586eff5552353 |
| publicationDate | 2012-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012033619-A |
| titleOfInvention | Substrate processing apparatus and substrate transfer method |
| abstract | An object of the present invention is to provide a substrate processing apparatus capable of transporting a substrate in a configuration in which a sufficient transfer space cannot be secured between target slots. A reaction vessel for processing a substrate therein, a first derivative for heating the substrate housed in a central portion, and a plurality of the first derivatives in a direction in which the reaction vessel extends are predetermined. A derivative holding body held at an interval, a second derivative held at both ends of the derivative holding body, and a plurality of the first holding pieces held at least on the derivative holding body in the reaction vessel. An induction heating apparatus for induction heating the first derivative and the second derivative, and control so that the first derivative or the second derivative is sequentially transferred from the uppermost stage to the lowermost stage of the derivative holder. Control means. [Selection] Figure 8 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I717694-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102052438-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I668810-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I717693-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017168675-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10559485-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015145974-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108885992-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190096460-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108885992-A |
| priorityDate | 2010-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.