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filingDate 2011-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_421de8a7ac25307ee1b7ecb7b512306a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a6c0b9d0a2810cd5337a9552eec451a
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publicationDate 2012-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2012025733-A
titleOfInvention Organoaminosilane precursor and method for depositing film containing the same
abstract A precursor capable of depositing silicon oxide or silicon nitride at a low temperature by a process such as CVD or ALD is provided. A precursor and method for forming a dielectric film. In one embodiment, a silicon precursor having the following formula I is provided: [Selection figure] None
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