| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C11-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F3-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-14 |
| filingDate |
2010-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_066eb237f6ada51a7bbaf0d39f805d78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6518a1411979ac9d55b14c96234595c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcefe1bb4a1c71461d704d1691e43483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39f486150e96be1efee049821fde652d |
| publicationDate |
2012-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012025726-A |
| titleOfInvention |
Metal complex having β-diketonato having dialkylalkoxymethyl group as ligand, and method for producing metal-containing thin film using the metal complex |
| abstract |
A metal complex having a low melting point and excellent in thermal stability and suitable for film formation by a CVD method and a method for producing a metal-containing thin film using the metal complex are provided. SOLUTION: General formula (1) (Wherein X represents the general formula (2) (Wherein R a , R b and R c each independently represents a linear or branched alkyl group having 1 to 5 carbon atoms), Y is The group represented by the formula (2) or a linear or branched alkyl group having 1 to 8 carbon atoms, Z represents a hydrogen atom or a linear or branched alkyl group having 1 to 4 carbon atoms. . The metal complex which has the (beta) -diketonato ligand shown by this. [Selection] Figure A1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7011333-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200034636-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102394907-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022017297-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020045340-A |
| priorityDate |
2009-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |