| abstract |
The present invention is directed to manufacturing a sensor device that prevents corrosion of a metal electrode of a sensor due to humid outside air, and also prevents sensor warpage due to resin sealing of the sensor, thereby reducing the influence on sensor characteristics. Methods and sensor devices are provided. A method for manufacturing a sensor device includes: a fixed part; a movable part located inside the fixed part; a flexible part connecting the fixed part and the movable part; and a sensor having a plurality of metal electrodes on a substrate. The plurality of metal electrodes of the sensor and the plurality of terminals of the substrate are electrically connected by bonding wires, and a part of the bonding wires between the plurality of metal electrodes and the plurality of terminals are exposed. As such, the portions of the plurality of metal electrodes of the sensor connected to the bonding wires are covered with resin. [Selection] Figure 1 |