http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012008550-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2011-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670712e4c98df4c464bc1ac57747e207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcb142bcea5ae883356b016617eda596 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
publicationDate | 2012-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2012008550-A |
titleOfInvention | Resist composition and method for producing resist pattern |
abstract | There is provided a resist composition capable of forming a pattern with a wide exposure margin and obtaining a pattern having excellent resolution and line edge roughness. A resin having an acid labile group and insoluble or hardly soluble in an alkaline aqueous solution and soluble in an alkaline aqueous solution by the action of an acid; an acid generator represented by the formula (B1); A resist composition containing a compound represented by formula (I): [Wherein, Q 1 and Q 2 are each independently a fluorine atom or a perfluoroalkyl group; L b1 is a single bond or a divalent saturated hydrocarbon group; Y is an optionally substituted aliphatic group; Z + is an organic cation; R 1 and R 2 are each independently an aliphatic hydrocarbon group or a saturated cyclic hydrocarbon group, etc .; R 3 is an aliphatic hydrocarbon Group or saturated cyclic hydrocarbon group; L 1 represents a divalent saturated hydrocarbon group; ring W 1 represents a heterocyclic ring. ] [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230044128-A |
priorityDate | 2010-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 239.