http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011514871-A

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filingDate 2008-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2011-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2011514871-A
titleOfInvention Apparatus and method for reducing the content of elements such as boron in halogen silanes
abstract The present invention relates to elements of the third main group of the periodic table of elements in industrial purity halogen silanes, in particular boron and aluminum, in order to produce very high purity halogen silanes, in particular very high purity chlorosilanes. Relates to a method for reducing the content of compounds comprising The invention further relates to an apparatus for carrying out the method.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016006210-A1
priorityDate 2008-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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