http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011511160-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-406 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C251-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32051 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-365 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 |
| filingDate | 2009-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011511160-A |
| titleOfInvention | New metal precursor containing β-diketiminate ligand |
| abstract | Methods and compositions for depositing a metal-containing thin film on a substrate include introducing a vapor phase metal-organic precursor into a reaction chamber that includes one or more substrates. The precursor has at least one β-diketiminate ligand and has the general formula: M (R 1 C (NR 4 ) CR 2 C (NR 5 ) R 3 ) 2 L n . Here, M is a metal selected from nickel, cobalt, ruthenium, iridium, palladium, platinum, silver and gold. Each R 1-5 is an organic ligand independently selected from H; and C 1 -C 4 linear or branched alkyl groups, alkylsilyl groups, alkylamide groups, alkoxy groups, or alkylsilylamide groups . Each L is independently selected from hydrocarbons; oxygen-containing hydrocarbons: amines; polyamines; bipyridines; oxygen-containing heterocycles, nitrogen-containing heterocycles, and combinations thereof, and n is 0 to 4 including 0 and 4 An integer in the range A metal-containing film is deposited on the substrate while maintaining the substrate at a temperature between about 100 ° C and about 500 ° C. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013181231-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017171664-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102066112-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160057445-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014528940-A |
| priorityDate | 2008-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 78.