http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011510820-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1305 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0738 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-705 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0927 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1305 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0626 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-073 |
| filingDate | 2009-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011510820-A |
| titleOfInvention | Irradiation apparatus and method for controlling the energy of a laser light source |
| abstract | The present invention relates to an irradiation apparatus for irradiating a sample (66) on a workbench (68) with an energy-controlled narrow irradiation line (70), the irradiation line (70) being a beam path (13). A second direction that is generated from a laser beam (12) propagating along and emitted from a laser light source (10) and perpendicular to the first direction (x) in a first direction (x) The apparatus has a dimension that exceeds the dimension of (y) by a certain multiple, and the apparatus includes a beam shaping optical system (80) for shaping the laser beam (12) into a linear shape (70a), and a laser beam (12 ) And an energy measuring device (58) for measuring the energy of the laser light source and generating a control signal (78) for the measured laser beam energy and the energy of the laser light source (10) for the control signal (78). For controlling the output Nerugi control system including the (76). The present invention provides that the energy measuring device (58) is placed in the beam path (13) after the beam shaping optics (80) and before the workbench (68), or the control signal (78) The beam energy averaged along the dimension in the first direction (x) of the linear beam (70a) is characterized. The present invention further controls the energy of the laser light source (10) when irradiating the sample (66) on the workbench (68) with a narrow irradiation line (70), whereby the irradiation line (70) Propagating along the beam path (13), emitted from the laser source (10) and having a dimension in a second direction (y) perpendicular to the first direction in the first direction (x). With respect to a method generated from a laser beam (12) having a dimension exceeding a certain multiple, the method includes shaping the laser beam (12) into a line (70a) and the energy of the linear laser beam (12). , Generating a control signal (78) for the measured laser beam energy, and controlling the energy output of the laser light source (10) for the control signal (78). According to the present invention, the control signal (78) indicates the beam energy averaged along the dimension in the first direction of the linear beam (70a). According to another aspect of the invention, the energy of the laser beam (12) in the beam path (13) is measured after the beam shaping stage and before the workbench (68). [Selection] Figure 2 |
| priorityDate | 2008-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.