http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011259371-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00 |
| filingDate | 2010-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71ee5d817c259253d1f63d4586c9c1ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_baf7f68503937c96a6cafef2f8a44ffb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c80095804d7189cf580af0eacf5fb79 |
| publicationDate | 2011-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011259371-A |
| titleOfInvention | Method for manufacturing capacitive electromechanical transducer |
| abstract | A method of manufacturing a capacitive electromechanical transducer capable of removing a sacrificial layer for forming a cavity at a relatively high speed and reducing a residue. A cavity is formed by a vibrating membrane that is held movably at a predetermined distance from a substrate, an electrode that exposes a surface facing the cavity, and an insulating film that is a surface facing the cavity. It is a manufacturing method of a capacitive electromechanical transducer having an electrode 1 to be covered. A sacrificial layer 6 is formed on the substrate, a layer including the vibration film 3 is formed on the sacrificial layer, and an etching hole 10 communicating with the sacrificial layer from the outside is formed. Thereafter, the electrode 8 whose surface facing the cavity is exposed as one electrode for electrolytic etching, and electricity is passed between the other electrode 12 in contact with the electrolytic etching solution provided outside, and the sacrificial layer is electrolytically etched. Thus, the cavity 9 is formed. A sacrificial layer removing agent is introduced from the etching hole 10 to reduce the sacrificial layer residue 17 due to electrolytic etching. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9752924-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015082711-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10119855-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9955949-B2 |
| priorityDate | 2010-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID180504 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453983605 |
Total number of triples: 23.