| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J50-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J50-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J50-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J50-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02J50-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2010-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e115ae769665483cf6138ac2a9a44a9b |
| publicationDate |
2011-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011253844-A |
| titleOfInvention |
Data acquisition method for substrate processing apparatus and sensor substrate |
| abstract |
To efficiently acquire data of each processing module of a substrate processing apparatus and perform a highly accurate inspection. A sensor substrate having a sensor unit for collecting information of a processing module and a first power source unit including a power storage unit that supplies power to the sensor unit and can be charged is first held. A step of holding the member, a step of advancing the first holding member and then transferring the sensor substrate to the processing module, a step of acquiring data relating to the processing module by the sensor unit of the sensor substrate, and The first holding member receives the sensor substrate that has consumed the charged electric power from the processing module, moves backward with the second power supply unit that moves together with the base, and contacts the first substrate of the sensor without contact. And a process of charging the power supply unit. [Selection] Figure 13 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021048415-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7346536-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11569138-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012079941-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018129509-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018526814-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014017323-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014078571-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7050139-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7262170-B2 |
| priorityDate |
2010-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |