http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011248177-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 |
| filingDate | 2010-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cc1db49bfd3b30adf323473ea1a4126 |
| publicationDate | 2011-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011248177-A |
| titleOfInvention | Resist composition |
| abstract | A resist composition capable of forming a pattern having excellent resolution and mask error factor (MEF) is provided. A resin having an acid labile group and insoluble or hardly soluble in an alkaline aqueous solution and soluble in an alkaline aqueous solution by the action of an acid, an acid generator, and a compound represented by the formula (I): And a salt composition. [R 1 to R 5 represent a hydrogen atom, a hydrocarbon group having 1 to 12 carbon atoms, or an acyl group having 2 to 13 carbon atoms. R 6 and R 7 represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. R 8 to R 10 represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, or R 8 and R 9 are bonded to each other to form a ring, and —CH 2 — contained in the hydrocarbon group is — O—, —S—, or —NR 11 — may be substituted. R 11 represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, or is bonded to R 8 to form a ring. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015148652-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012220571-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012013807-A |
| priorityDate | 2010-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 306.