http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011247767-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4a8faea375370b67c9d71e67db32bcd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2010-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70e87c672acc74e6593bb74a2b819ab3 |
| publicationDate | 2011-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011247767-A |
| titleOfInvention | Interposer board |
| abstract | PROBLEM TO BE SOLVED: To provide an interposer substrate capable of accurately measuring an electrical characteristic of a portion where a measurement terminal becomes a semiconductor chip with little deformation of a substrate for fixing a measurement terminal and easily recognizing an alignment mark. To do. SOLUTION: Since the main surface of the interposer substrate has a bottomed hole as an alignment mark and the bottom surface of the bottomed hole has a convex shape that becomes shallower inward, the strength of the interposer substrate However, the alignment mark is increased as compared with the case where the alignment mark is a through hole, so that the bending of the product can be suppressed and high-accuracy positioning can be performed. Furthermore, since the area close to the flat surface of the bottomed hole becomes smaller, the reflected light for image recognition can be reduced, and the contrast between the alignment mark and the main surface can be increased, making the alignment mark recognizable. It can be improved. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113219324-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113219324-B |
| priorityDate | 2010-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.