| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C321-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C303-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 |
| filingDate |
2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88d582b812cdf3e86064b9299c6affb4 |
| publicationDate |
2011-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011246444-A |
| titleOfInvention |
Salt and resist composition |
| abstract |
To provide a salt useful as an acid generator of a resist composition capable of forming a pattern having excellent resolution and line edge roughness. A salt represented by formula (I). [W 1 represents a saturated hydrocarbon ring having 3 to 36 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon ring may be substituted with an alkyl group having 1 to 6 carbon atoms; The —CH 2 — contained may be replaced by —O—, —SO 2 — or —CO—. L 1 represents a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom, and the divalent —CH 2 — contained in the saturated hydrocarbon group may be replaced by —O— or —CO—. R 1 and R 2 represent an alkyl group having 1 to 6 carbon atoms which may have a fluorine atom. R 3 and R 4 represent a fluorine atom or a C 1-6 perfluoroalkyl group. Z + represents an organic cation. ] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013166748-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7285141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018115149-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019218340-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013166749-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013166747-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014115619-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018090565-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013173731-A |
| priorityDate |
2010-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |