http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011222860-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1347d9c8ff78439fafe12842a5b9afe3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2010-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74223f75decd120be7784cb91a1d99e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93e92195735d7890c5fe53f7e798a920 |
| publicationDate | 2011-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011222860-A |
| titleOfInvention | Plasma oxidation method and plasma oxidation apparatus |
| abstract | The present invention provides a plasma oxidation method and apparatus capable of increasing the oxidation rate even when the substrate temperature is low, enabling oxidation at low temperature and enabling thick film oxidation. An oxygen-containing plasma is generated with a process gas containing oxygen, a bias voltage is applied from a transformer-coupled bias power source to a substrate 16 placed on a stage 18, and the maximum bias potential of the substrate 16 is applied. By controlling the bias potential such that Vmax and the minimum value Vmin satisfy the relationship of Vmin <Vp <Vmax with respect to the plasma potential Vp, positive ions and negative ions in the oxygen-containing plasma are applied to the substrate 16. The substrate 16 is plasma oxidized by the plasma processing apparatus 10 to be irradiated. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7313929-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7349910-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021132344-A1 |
| priorityDate | 2010-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.