http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011220955-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
filingDate | 2010-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_518e7624c4810577013319e28e1caa1e |
publicationDate | 2011-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2011220955-A |
titleOfInvention | Chemical sensor and detection method |
abstract | [PROBLEMS] To improve detection sensitivity of a substance to be detected in a chemical sensor. A chemical sensor includes a sensitive element for detecting a substance to be detected in a liquid, and the sensitive element is provided between a drain region of a first conductivity type and a source region of a first conductivity type. A first semiconductor region in which a channel region of two conductivity type is formed, a substrate layer supporting the drain region of the first conductivity type and the source region of the first conductivity type, a surface side on the channel region of the second conductivity type, And a sensitive film formed on both of the back side. An air gap is formed between the substrate layer and the sensitive film on the channel region of the second conductivity type. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019230917-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019002820-A |
priorityDate | 2010-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.