| abstract |
A compact and high-performance pressure sensor is provided. A sensor chip, a differential pressure diaphragm provided at a central portion of the sensor chip, a differential pressure gauge provided on the differential pressure diaphragm, and an outer peripheral portion of the differential pressure diaphragm. A pressure provided with a static pressure diaphragm 17, a first static pressure gauge 16 d formed at an end of the static pressure diaphragm 17, and a second static pressure gauge 15 b formed at the center of the static pressure diaphragm 17. It is a sensor. [Selection] Figure 1 |