http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011216580-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_435f7fafc4b931eae59de228af7272de |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2010-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a39e4dcaba5b01a1f0f24825594746b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd58b8ea2744194d010822eb8500a4dd |
| publicationDate | 2011-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011216580-A |
| titleOfInvention | Group III nitride semiconductor growth method |
| abstract | A method for growing a group III nitride semiconductor capable of growing a group III nitride semiconductor crystal having a relatively small film thickness and good crystallinity is provided. A group III nitride semiconductor growth method according to the present invention includes a first step of forming a group III nitride semiconductor crystal nucleus (40) in an island shape on a substrate (10), and a nitrogen source gas. While supplying silicon source gas and group III source gas alternately, a second step of growing the crystal nuclei (40) in an island shape, and after the second step, nitrogen source gas and III A third step of supplying a group source gas and growing a group III nitride semiconductor from each of the island-shaped crystal nuclei (40) to form a layered group III nitride semiconductor (45). It is characterized by. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014179628-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113451451-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015029042-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9679974-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113451451-B |
| priorityDate | 2010-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.