http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011206822-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-066 |
filingDate | 2010-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_751b85edd2eac6bd456bcb8964c70dad |
publicationDate | 2011-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2011206822-A |
titleOfInvention | Light irradiation apparatus and modulation mask |
abstract | Provided is a light irradiation device that modulates light from a light source and irradiates an object with at least one light having a substantially circular isointensity line. A light irradiation device includes: a mask illumination system that emits light; a modulation mask that emits light after modulating the light from the mask illumination system; and an object to be irradiated by imaging the modulated light. And an image-forming optical system 17 for irradiating 18. The modulation mask 21 includes a modulation region 22 having a circular outline and a non-modulation region 23 formed so as to fill between the modulation regions 22. The modulation region 22 is formed so as to fill a large number of first phase modulation unit regions 25a for modulating light with the first phase modulation amount and each first phase modulation unit region 25a, and the light with the second phase modulation amount. And a second phase modulation region 25b to be modulated. Each first phase modulation unit region 25 a is provided along a virtual circumferential direction line 27. [Selection] Figure 3 |
priorityDate | 2010-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006049481-A |
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408 |
Total number of triples: 12.