http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011204931-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_781c429e4e20536916ff74dcbe1b5417 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-40 |
| filingDate | 2010-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8fe4bc1d4de83e9f12f09403c6e47e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b0cc8699ee58c5936410950cfb83353 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7101078f4c1a941bcc1612310bcb8bd |
| publicationDate | 2011-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011204931-A |
| titleOfInvention | Vapor phase growth method of group III-V compound semiconductor |
| abstract | Provided is a method for vapor phase growth of a III-V group compound semiconductor capable of burying and growing a structure that has been processed to be rugged over the entire surface of a wafer and capable of stable burying and flattening regardless of the rugged shape. . On the surface of a III-V group compound semiconductor substrate, a quaternary III-V group compound semiconductor layer having regular irregularities is formed by metal organic vapor phase epitaxy. After the III-V compound semiconductor layer serving as a protective film for suppressing thermal deformation is epitaxially grown at the first growth temperature to a predetermined film thickness, a second growth temperature higher than the first growth temperature is obtained. The semiconductor layers having the same composition were grown continuously until the total thickness was larger than the height of the irregularities. [Selection] Figure 1 |
| priorityDate | 2010-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.