| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate |
2010-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d8214e850fe5fb66c831964463d37a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5527249275ce6b483ce0e5cb61541fcf |
| publicationDate |
2011-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011202199-A |
| titleOfInvention |
Organometallic compound feeder |
| abstract |
An organometallic compound supply device is provided that is less likely to cause channeling even when the capacity of a container is increased, and that can stably supply an organometallic compound for a longer period of time. The supply apparatus includes two column-type containers 10A and 10B filled with an organometallic compound 6 and a communication pipe 5 that communicates the inside of the containers 10A and 10B at its lower end. A gas introduction pipe 2 is provided above the container 10A, and a gas outlet pipe 3 is provided above the container 10B. The interior of the container 10A is partitioned into a plurality of spaces S1 to S3 that communicate in order from the side where the gas introduction pipe 2 is connected to the side where the communication pipe 5 is connected so that the flow direction of the carrier gas is in the vertical direction. Has been. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102286480-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200063946-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101472529-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018234285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I657022-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019007073-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7240881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6324609-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020114581-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019115361-A1 |
| priorityDate |
2010-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |