| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_562de9eaba2b90ce100ddce9749e926d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-177
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1021 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 |
| filingDate |
2010-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe3dd6cb4f51ab67c0706f584897dfa9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8004c8630000d303fbdc6b92fe4305a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7216b3f00814ea70ee123bf34ef804f8 |
| publicationDate |
2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011199817-A |
| titleOfInvention |
Method for manufacturing piezoelectric vibrating piece |
| abstract |
The present invention provides a method of manufacturing a piezoelectric vibrating piece in which a staircase region is provided on the outer periphery of a main surface. A method of manufacturing a mesa-type piezoelectric vibrating piece includes a step of forming a metal film on a piezoelectric substrate (S101) and a through groove forming step of forming a through groove on a piezoelectric material wafer to form an outer shape of the piezoelectric substrate. (S106), a step of forming a photoresist film on the surface of the metal film (S202), a step of forming a resist pattern on the planar shape of the first mesa step (S203), and a metal not covered with the resist pattern Etching the film to form a metal film pattern (S204), etching the piezoelectric substrate using the metal film pattern as a protective film to form a first mesa step (S301), and forming the metal film pattern into the metal film Etching from the side surface of the pattern (S302), and forming the second mesa step by etching the piezoelectric substrate using the metal film pattern whose side surface is etched as a protective film (S304). [Selection] Figure 6 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10103710-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013172222-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014143588-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014146945-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013146002-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013197916-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014165314-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013192044-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017034667-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018088656-A |
| priorityDate |
2010-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |