http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011183554-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C41-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate | 2010-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_860cae9cee31c69ffc75666d6b04ceed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba71171a3e479485f9680df1fa0d8dc3 |
| publicationDate | 2011-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011183554-A |
| titleOfInvention | Manufacturing method of fine structure |
| abstract | The present invention provides a method for producing a microstructure having a large area with good productivity obtained by curing a curable material by a sol-gel method and containing a cured material having a fine structure formed on the surface thereof with high dimensional accuracy. In a method for manufacturing a microstructure including a cured material having a microstructure formed on a surface, obtained by curing a curable material by a sol-gel method, the solution containing the curable material is represented by the formula Si (X tetrafunctional silane represented by 1) 4, trifunctional silane represented by the formula RSi (X 2) 3, fluorinated surfactant comprises an organic solvent, and water, and wherein the trifunctional with respect to the tetrafunctional silane The molar ratio of silane is 0.03-1. X 1 and X 2 are each independently an alkoxy group having 1 to 6 carbon atoms, R is a substituted or unsubstituted monovalent organic group having 1 to 10 carbon atoms (however, an atom bonded to a silicon atom is a carbon atom) is there). [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108885394-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108885394-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023190168-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013074015-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015211050-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019503277-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019512888-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013047136-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018207128-A |
| priorityDate | 2010-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 104.