http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011180569-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C219-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2010-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b371d878503af0da2b50566aef90ca7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_321d114d76108c3dfde0d4c0b5877dde http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52cce40b8476edb4278cec332665b093 |
| publicationDate | 2011-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011180569-A |
| titleOfInvention | Resist composition, resist pattern forming method, and nitrogen-containing organic compound |
| abstract | Kind Code: A1 A resist composition having excellent storage stability and good lithography properties, a resist pattern forming method using the resist composition, and a nitrogen-containing organic compound useful as a nitrogen-containing organic compound component contained in the resist composition Provided. A base material component (A) whose solubility in an alkali developer is changed by the action of an acid, an acid generator component (B) that generates an acid upon exposure, and the following general formula (d1) A resist composition comprising a nitrogen-containing organic compound component (D). [Wherein, R 1 each independently represents a hydrogen atom, a linear, branched or cyclic alkyl group which may have a substituent, or an aryl group; and R 2 each independently And represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. ] [Selection figure] None |
| priorityDate | 2010-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 340.