| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0693
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-1486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0046 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-47 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-06 |
| filingDate |
2010-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bdeba161a810bdde0b0cc297a17746f |
| publicationDate |
2011-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011180015-A |
| titleOfInvention |
Particle count measurement method |
| abstract |
A particle number measuring method capable of accurately measuring the number of particles generated due to a specific factor is provided. Laser light 25 enters a main exhaust line 16 through a glass window 24, and scattered light L1, L2 generated from particles P1, P2 crossing the laser light 25 is received by a photodetector 21. When measuring the number of particles based on the received scattered light, the non-moving particles P2 are regarded as dirt adhering to the glass window 24, and the number of non-moving particles P2 is measured in the main exhaust line 16. It is excluded from the number of particles. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11333602-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018078727-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018078727-A1 |
| priorityDate |
2010-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |