http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011178154-A

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publicationDate 2011-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2011178154-A
titleOfInvention Nozzle plate and manufacturing method thereof
abstract A nozzle plate is provided that can prevent fine particles from accumulating inside micropores and closing micropores. A plate 12 is formed so as to penetrate the top and bottom of the plate 12 and has a smooth inner surface, and a plurality of microscopic shapes formed so that an inner diameter increases from the bottom to the top of the plate 12. It has a hole 14. [Selection] Figure 10
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Total number of triples: 23.