http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011176064-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2010-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50466849d3620d1a2b4ff654c5f65688 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a034745d2195eeef1c3f613066c24141 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98a5655f9d3dad1894493a2b3dc75374 |
| publicationDate | 2011-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011176064-A |
| titleOfInvention | Wafer holder |
| abstract | An electrode member for supplying electric power to a conductor embedded in a ceramic substrate is not corroded, and a highly reliable wafer holder is provided even when used for a long time. A wafer holder according to the present invention has a conductive terminal connected to a conductor embedded in a ceramic substrate and a deformable electrode connection conductor connected to the conductive terminal connected to the wafer holder. The cylindrical ceramic member is surrounded, and the inside of the cylindrical ceramic member is sealed in a non-oxidizing atmosphere. [Selection] Figure 1 |
| priorityDate | 2010-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.