| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d29f7ac2c7f9be9f7dae1a83bbb5c92 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-1071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-10763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-10736 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107 |
| filingDate |
2010-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71c43e2060ce30c92ea12743f29b2abf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e17a49fa54a2834b4bed78bd6ca9b53 |
| publicationDate |
2011-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011168443-A |
| titleOfInvention |
Method for producing trichlorosilane |
| abstract |
An object of the present invention is to provide a method capable of effectively and industrially implementing exhaust gas after condensing and separating trichlorosilane from a reaction product gas when producing trichlorosilane by reaction of metallic silicon and hydrogen chloride. A first manufacturing process in which hydrogen chloride is reacted with metallic silicon to produce trichlorosilane and a second manufacturing process in which tetrachlorosilane and hydrogen are reacted with metallic silicon to produce trichlorosilane are mutually connected. The trichlorosilane is condensed and separated from the reaction product gas containing trichlorosilane obtained by the first manufacturing process, and the exhaust gas after the trichlorosilane is condensed and separated is used as a hydrogen source. It is characterized by supplying to the manufacturing process. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019098345-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190072552-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11034585-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013193941-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019098345-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015536298-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9643851-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018074269-A1 |
| priorityDate |
2010-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |